Fast valve for gas injection into vacuum
- 1 June 1978
- news
- Published by AIP Publishing
- Vol. 49 (6) , 872-873
- https://doi.org/10.1063/1.1135637
Abstract
A simple, fast, reliable magnetically driven gas valve for use in plasma experiments is described. The pressure rise time has been measured to be ∼1 Torr/μs at the valve opening.Keywords
This publication has 5 references indexed in Scilit:
- Pinch of a Gas JetPhysical Review Letters, 1978
- A Pulsed Gas Valve for Fast Timeable High Pressure OperationReview of Scientific Instruments, 1969
- Ionization Gauge for Transient Gas Pressure MeasurementsReview of Scientific Instruments, 1966
- Fast Gas Valve for Plasma ResearchReview of Scientific Instruments, 1962
- Magnetically Driven Fast-Acting Valve for Gas Injection into High VacuaReview of Scientific Instruments, 1960