Low Temperature Molecular Beam Epitaxy of Silicon (Si-MBE)

• 1 January 1989
• journal article
• Published by IOP Publishing in Physica Scripta
• Vol. T29, 147-151
• https://doi.org/10.1088/0031-8949/1989/t29/027

Abstract

Keywords

• SILICON
• SI MBE
• LOW TEMPERATURE
• BEAM EPITAXY
• TEMPERATURE MOLECULAR BEAM