Sputtering of TiN coatings during ion beam mixing
- 1 July 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 174, 139-142
- https://doi.org/10.1016/0040-6090(89)90881-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Fundamental aspects of ion beam mixingNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Frozen target measurements of the 430 keV 15N(p,αψ) resonanceNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Energy calibration of the 500 kV heavy ion implanter ionasNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Theoretical aspects of atomic mixing by ion beamsNuclear Instruments and Methods, 1981
- The depth resolution of sputter profilingApplied Physics A, 1979