Characterization and improvement of the layer uniformity for large-area quantum well device arrays grown in an Intevac/Varian Gen II molecular beam epitaxy system
- 1 March 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (2) , 1086-1090
- https://doi.org/10.1116/1.587094
Abstract
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