Fabrication of high aspect ratio silicon micro-tips for field emission devices

• 1 January 1997
• journal article
• Published by Springer Nature in Journal of Materials Science
• Vol. 32  (18) , 4999-5003
• https://doi.org/10.1023/a:1018692711614

Abstract

Keywords

• HIGH ASPECT RATIO
• FIELD EMISSION
• HIGHER ORDER