Channeling contrast microscopy: Application to semiconductor structures

This publication has 7 references indexed in Scilit:

• Semiconductor analysis with a channeled helium microbeam
  Nuclear Instruments and Methods in Physics Research, 1981
• The Melbourne proton microprobe
  Journal of Microscopy, 1979
• The production and use of a nuclear microprobe of ions at MeV energies
  Nuclear Instruments and Methods, 1979
• Solid solubility of As in Si as determined by ion implantation and cw laser annealing
  Applied Physics Letters, 1979
• Solid-phase epitaxy of implanted silicon by cw Ar ion laser irradiation
  Applied Physics Letters, 1978
• The application of high-resolution Rutherford backscattering techniques to near-surface analysis
  Nuclear Instruments and Methods, 1978
• Solid Solubilities of Impurity Elements in Germanium and Silicon*
  Bell System Technical Journal, 1960