High-speed GaAlAs/GaAs p-i-n photodiode on a semi-insulating GaAs substrate

Abstract
A high‐speed, high‐responsivity GaAlAs/GaAs pin photodiode has been fabricated on a GaAs semi‐insulating substrate. The 75‐μm‐diam photodiode has a 3‐dB bandwidth of 2.5 GHz and responsivity of 0.45 A/W at 8400 Å (external quantum efficiency of 65%). The diode is suitable for monolithic integration with other optoelectronic devices.

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