A New Type of Low-ϰ Dielectric Films Based on Polysilsesquioxanes

• 27 September 2002
• journal article
• research article
• Published by Wiley in Advanced Materials
• Vol. 14  (19) , 1369-1373
• https://doi.org/10.1002/1521-4095(20021002)14:19<1369::aid-adma1369>3.0.co;2-i

Abstract

Keywords

• COPOLYMERS
• DIELECTRIC CONSTANT
• HYDROSILYLATION
• THIN FILMS