Nickel stamp fabrication using step & stamp imprint lithography
- 1 April 2006
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 83 (4-9) , 948-950
- https://doi.org/10.1016/j.mee.2006.01.038
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Nanoimprint lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Imprint of sub-25 nm vias and trenches in polymersApplied Physics Letters, 1995