Indium-Tin Oxide Thin Films Prepared by Thermal Decomposition of Metallic Complex Salts

1 October 1988

journal article
Published by IOP Publishing in Japanese Journal of Applied Physics

Vol. 27 (10A) , L1829-1831
https://doi.org/10.1143/jjap.27.l1829

Abstract

Transparent conductive indium-tin oxide thin films were prepared by thermal decomposition of metallic complex salts. The films of high transparency and low electric resistivity (4.23×10^-4 Ω·cm) were obtained by dip coating glass substrates with raw-material solution followed by heating at 500°C for 20 min in an inert atmosphere.

Keywords

THERMAL DECOMPOSITION
DIP COATING
INDIUM TIN OXIDE
RAW MATERIALS
THIN FILM
ELECTRICAL RESISTANCE