Epitaxial lateral overgrowth of Si on (100)Si substrates by liquid-phase epitaxy

• 1 March 1998
• journal article
• Published by Elsevier in Journal of Crystal Growth
• Vol. 186  (3) , 369-374
• https://doi.org/10.1016/s0022-0248(97)00541-1

Abstract

Keywords

• CROSS SECTION