Surface damage and topography changes produced during sputtering

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Abstract
Ion bombardment of solids creates radiation damage in the form of interstitials and vacancies which agglomerate into dislocation structures, so becoming visible in the electron microscope. Furthermore, ion bombardment causes sputtering of atoms from the surface of solids which can give rise to changes in surface topography. The paper will briefly review the salient features of these two phenomena and in particular will point out their interrelation.