Defect production, multiple ion–solid interactions and amorphization in SiC
- 12 February 2002
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 191 (1-4) , 487-496
- https://doi.org/10.1016/s0168-583x(02)00598-0
Abstract
No abstract availableKeywords
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