Polysilphenylenesiloxane Resin as an Interlevel Dielectric for VLSI Multilevel Interconnections
- 1 October 1990
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 137 (10) , 3223-3229
- https://doi.org/10.1149/1.2086191
Abstract
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