ATOM PROBE MICROANALYSIS OF THE COLD-GALLIUM ARSENlDE INTERFACE

1 November 1987

journal article
Published by EDP Sciences in Le Journal de Physique Colloques

Vol. 48 (C6) , C6-463
https://doi.org/10.1051/jphyscol:1987676

Abstract

Methods for analysis of gallium arsenide using an energy compensated atom probe are described. The oxide layer formed in dry air on gallium arsenide was found to consist of gallium and oxygen, and gold deposited onto the oxide formed small islands of pure gold. Deposition of gold onto clean gallium arsenide resulted in the formation of intermixed gold-gallium-arsenic layers, between a fraction of a monolayer and several monolayers in thickness

Keywords

ATOM PROBE
PROBE MICROANALYSIS
ARSENLDE INTERFACE
COLD GALLIUM ARSENLDE

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