Wall Temperature Dependence of Boronization Using Decaborane and Diborane
- 1 September 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (9R) , 3968-3974
- https://doi.org/10.1143/jjap.32.3968
Abstract
A new boronization technique based on pyrolysis of boron hydrides on hot walls was investigated in a laboratory experiment. The deposition rate of boron films through pyrolysis of decaborane was high enough to apply the pyrolysis to actual fusion devices bakable to 300°C. The hydrogen concentration of boron films prepared by the pyrolysis or conventional plasma-assisted boronization at various temperatures was measured with 15N nuclear reaction and/or IR absorption methods. The hydrogen content markedly decreased with increasing wall temperature, where decaborane always gives higher H content than diborane. Oxygen gettering and hydrogen recycling in a boronized vessel were evaluated by pulsed glow discharge in O2/He and D2, respectively. The results were compared between the pyrolysis and the plasma-based boronizations in decaborane or diborane at various wall temperatures.Keywords
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