High-rate aluminum oxide deposition by MetaModeTM reactive sputtering

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 10  (6) , 3401-3406
• https://doi.org/10.1116/1.577791

Abstract

Keywords

• ALUMINUM OXIDE
• OPTICAL QUALITY
• COATINGS
• METAMODETM REACTIVE SPUTTERING