Laser interferometric diffractometry for measurements of diffraction grating spacing
- 20 August 1996
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 35 (24) , 4782-4786
- https://doi.org/10.1364/ao.35.004782
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 2 references indexed in Scilit:
- Linewidth measurement of gratings on photomasks: a simple techniqueApplied Optics, 1992
- Linewidth measurement on IC masks and wafers by grating test patternsApplied Optics, 1980