Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition
- 15 April 1988
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 27 (8) , 1499-1502
- https://doi.org/10.1364/ao.27.001499
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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