Ion-beam sputter deposition process for Y₁Ba₂Cu₃O₇-δ thin-film structures

This publication has 13 references indexed in Scilit:

• Substrate dependence of the crystallinity and mosaic texture of YBa₂Cu₃O_7−δ ultrathin films deposited by laser ablation
  Journal of Materials Research, 1993
• A high-flux atomic oxygen source for the deposition of high T c superconducting films
  Review of Scientific Instruments, 1992
• Large area superconducting YBa2Cu3O7-x films grown by single target ion beam sputtering
  Physica C: Superconductivity and its Applications, 1991
• Thermodynamic Estimation of Oxidation Ability of Various Gases Used for the Preparation of Superconducting Films at High Vacuum
  Japanese Journal of Applied Physics, 1991
• Oxidation kinetics of YBa2Cu3O7−x thin films in the presence of atomic oxygen and molecular oxygen by in-situ resistivity measurements
  Journal of Applied Physics, 1991
• The Irradiation Effects of an Oxygen Radical Beam on the Preparation of Superconducting Thin Films
  Japanese Journal of Applied Physics, 1991
• Oxygen atom actinometry reinvestigated: Comparison with absolute measurements by resonance absorption at 130 nm
  Journal of Applied Physics, 1991
• The effects of concurrent oxygen ion bombardment on ion beam sputtered Y1Ba2Cu3Ox thin films
  Thin Solid Films, 1990
• Lanthanide gallate perovskite-type substrates for epitaxial, high-T_c superconducting Ba₂YCu₃O_7-δ films
  IBM Journal of Research and Development, 1990
• Role of atomic oxygen produced by an electron cyclotron resonance plasma in the oxidation of YBa2Cu3O7−x thin films studied by i n s i t u resistivity measurement
  Applied Physics Letters, 1990