Auger Spectra of HCl Vapor-Etched n[sup +] GaAs {100} Substrates

• 1 January 1973
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 120  (4) , 581
• https://doi.org/10.1149/1.2403504

Abstract

Keywords

• GAAS
• AUGER SPECTRA
• HCL VAPOR
• SUP
• SUBSTRATES
• ETCHED
• SPECTRA OF HCL