PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMS
- 1 August 1998
- journal article
- Published by Annual Reviews in Annual Review of Materials Science
- Vol. 28 (1) , 563-597
- https://doi.org/10.1146/annurev.matsci.28.1.563
Abstract
▪ Abstract Piezoelectric materials have been integrated with silicon microelectromechanical systems (MEMS) in both microsensor and microactuator applications. Thin-film materials selection and processing routes are reviewed. Some recent and emerging applications of piezoelectric MEMS are presented including acoustic emission microsensors, vibration monitors, molecular recognition biosensors, precision positioners, micropumps, and linear stepper motors.Keywords
This publication has 66 references indexed in Scilit:
- Sol-Gel Methods for Oxide CoatingsMaterials and Manufacturing Processes, 1997
- Influence of Al2O3 diffusion barrier and PbTiO3 seed layer on microstructural and ferroelectric characteristics of PZT thin films by sol-gel spin coating methodThin Solid Films, 1997
- Phase transformations in rapid thermal processed lead zirconate titanateJournal of Materials Research, 1995
- Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayersJournal of Materials Research, 1995
- On the evolution of structure and composition in sol-gel-derived lead zirconate titanate thin layersJournal of Materials Research, 1995
- Contribution of electrodes and microstructures to the electrical properties of Pb(Zr0.53Ti0.47)O3 thin film capacitorsJournal of Materials Research, 1994
- Formation kinetics of PbZrxTi1−xO3 thin filmsJournal of Materials Research, 1994
- An aqueous, low temperature process for synthesizing PZT(53,47) thin filmsIntegrated Ferroelectrics, 1993
- Sol-gel derived ferroelectric thin films in silicon micromachiningIntegrated Ferroelectrics, 1993
- Morphotropic phase boundary in Pb (Mg13Nb23) O3-PbTiO3 systemMaterials Letters, 1989