Field Emission Deflection Energy Analyzer

Abstract
A Simpson-Kuyatt type spherical deflection energy analyzer has been adapted to a field emission source. A special decelerating lens allows the analyzer to be used over a wide range of electron energies and energy resolutions. For an electron energy of 2000 eV, a resolution of 20 meV has been demonstrated, while better resolution can be obtained for lower energies (∼10 meV at 1000 eV). Special techniques and new design features were employed to make the new analyzer compatible with ultrahigh vacuum (∼10−12 Torr).