Field Emission Deflection Energy Analyzer
- 1 January 1972
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 43 (1) , 108-111
- https://doi.org/10.1063/1.1685403
Abstract
A Simpson-Kuyatt type spherical deflection energy analyzer has been adapted to a field emission source. A special decelerating lens allows the analyzer to be used over a wide range of electron energies and energy resolutions. For an electron energy of 2000 eV, a resolution of 20 meV has been demonstrated, while better resolution can be obtained for lower energies (∼10 meV at 1000 eV). Special techniques and new design features were employed to make the new analyzer compatible with ultrahigh vacuum (∼10−12 Torr).Keywords
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