An overlay vernier and process bias monitor measured by voltage contrast SEM
- 1 January 1989
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 7, 129-131
- https://doi.org/10.1109/icmts.1989.39296
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Integrated electrical vernier to measure registration accuracyIEEE Electron Device Letters, 1986