A high-power long pulse excimer laser
- 1 March 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 1 (3) , 59-61
- https://doi.org/10.1109/68.87896
Abstract
Excimer lasers operating at high average powers are becoming important for materials-processing applications. A long-pulse excimer laser with automatic spark preionization which provides a pulse energy of 1 J with an optical pulse length of 200 ns full-width half-maximum for XeCl is described. Successful scaling of the repetition rate to 220 p.p.s. is discussed along with requirements for gas flow.Keywords
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