KrF Laser Induced Color Centers In Commercial Fused Silicas
- 16 December 1988
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
Abstract
This paper provides an overview of color center generation mechanisms in fused silica. Recent results obtained at Bell Laboratories, and elsewhere, proving the existence of excimer laser induced color centers are summarized. The impact of color centers on emerging DUV technologies are discussed, with regard to possible system power restrictions for acceptable optical lifetimes.Keywords
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