Modeling of the field transfer through thick dielectric lines: use in linewidth measurement
- 10 April 1991
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 30 (11) , 1355-1360
- https://doi.org/10.1364/ao.30.001355
Abstract
A numerical method for calculating the optical image of a thick line object is presented. It consists of slicing (fictitiously) the object and of analyzing the propagation through each elementary slice. The method is first developed for coherent light and then generalized for partially coherent illumination. Some results are compared with other simulations and with experiments.Keywords
This publication has 3 references indexed in Scilit:
- Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theoryJournal of the Optical Society of America A, 1988
- Analyticity of the angular spectrum amplitude of scattered fields and some of its consequencesJournal of the Optical Society of America A, 1985
- Diffraction of a Plane Wave at a Sinusoidally Stratified Dielectric GratingJournal of the Optical Society of America, 1966