Dark current reduction in APD with BCB passivation
- 29 March 2001
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 37 (7) , 455-457
- https://doi.org/10.1049/el:20010318
Abstract
Mesa-structure SL-APDs were fabricated using three different passivation materials, benzocyclobutene (BCB), polyimide and SiNx. The best dark current was from BCB passivated devices with a mesa-diameter of 30 µm was 38 nA when operated, approximately a factor of 10 improvement compared with other reports.Keywords
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