Radical and molecular product concentration measurements in CF4 and CH4 radio frequency plasmas by infrared tunable diode laser absorption
- 1 May 1990
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 8 (3) , 1722-1725
- https://doi.org/10.1116/1.576837
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: