A Design Procedure for High-Performance, Rib-Waveguide-Based Multimode Interference Couplers in Silicon-on-Insulator
- 28 October 2008
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Lightwave Technology
- Vol. 26 (16) , 2928-2936
- https://doi.org/10.1109/jlt.2007.914511
Abstract
Single mode silicon-on-insulator rib waveguides offer a weak lateral confinement, which makes it difficult to design high-performance multimode interference couplers (MMIs) based on these waveguides. Here, a complete design procedure for single etch step MMIs with tapered rib access waveguides is presented, which yields low excess loss (0.1 dB) and good imbalance (0.02 dB). Furthermore, polarization dependence is low, and high fabrication tolerances are achieved, especially with respect to etch depth.Keywords
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