A simple ion scattering spectrometer for surface studies

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Abstract
A simple instrument for low-energy ion scattering studies of surface composition and structure is described. Ions are analysed by a hemicylindrical mirror analyser which is also used for Auger electron spectroscopy. The ion source, typically used for 1 keV He+ or Ne+ ions, incorporates a quadrupole mass filter based on a commercial mass spectrometer. In its simplest form, the complete ion scattering facility can be fitted to a single 150 mm diameter flange compatible with most surface science instruments. The capabilities and limitations of the instrument are demonstrated with results for oxygen adsorption on Cu(100) surfaces.