Study of silicon carbide epitaxial growth kinetics in the SiC-C system

• 1 February 1979
• journal article
• Published by Elsevier in Journal of Crystal Growth
• Vol. 46  (2) , 269-273
• https://doi.org/10.1016/0022-0248(79)90068-x

Abstract

Keywords

• SILICON CARBIDE
• GROWTH KINETICS
• SIC
• EPITAXIAL GROWTH
• CARBIDE EPITAXIAL