The Implantation Of MeV Er Into Si

• 9 April 1985
• proceedings article
• Published by SPIE-Intl Soc Optical Eng
• https://doi.org/10.1117/12.946487

Abstract

Keywords

• DOPING
• LUMINESCENCE
• LASERS
• BACKSCATTER
• FABRICATION
• SEMICONDUCTORS
• NEAR INFRARED
• YTTERBIUM