Temperature dependence of peak heights in deep-level transient spectroscopy

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Abstract
With the aid of a high precision computer simulation we demonstrate that the frequently observed variation in DLTS peak height with emission rate window is not necessarily caused by nonexponential capacitance transients as is often supposed, but rather by the change in shape of the Debye tail with temperature. This variation in peak height is shown to be a function of temperature, reverse bias and trap depth.