Barrier layers: Principles and applications in microelectronics

• 1 April 1984
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 2  (2) , 273-280
• https://doi.org/10.1116/1.572580

Abstract

Keywords

• BARRIER LAYER
• SURVEYED
• STRUCTURES
• FUNCTION
• ALUMINUM
• SILICON
• MICROELECTRONICS
• DEVICE