Fabrication of Integrated Optical Elements Using a Computer-Controlled Electron Beam
- 1 March 1974
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 13 (3) , 636-641
- https://doi.org/10.1364/ao.13.000636
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 5 references indexed in Scilit:
- Fabrication of optical waveguides in electron resist filmsOptics Communications, 1973
- Thin Organosilicon Films for Integrated OpticsApplied Optics, 1972
- Mode Conversion Caused by Surface Imperfections of a Dielectric Slab WaveguideBell System Technical Journal, 1969
- Integrated Optics: An IntroductionBell System Technical Journal, 1969
- Dielectric Rectangular Waveguide and Directional Coupler for Integrated OpticsBell System Technical Journal, 1969