Local probing instrumentation at Advanced Technologies Center: Surface and force devices with tunneling sensor
- 1 May 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (3) , 1690-1693
- https://doi.org/10.1116/1.587264
Abstract
Force and surface devices with tunneling sensor—scanning tunneling and atomic force microscopes—are constructed. Thermal drift, seismic and electronic noise are eliminated in precise experiments. The tunneling sensor is proved to be advantageous for large scale images and force versus distance measurements with high dynamic range and subnanometer resolution. The influence of adsorbate on scanning tunneling microscope (STM) images of graphite is demonstrated. The holes 2 nm in diameter are produced on graphite exposed at air using STM.Keywords
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