Free volume effects in chemically amplified DUV positive resists
- 31 January 1996
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 30 (1-4) , 271-274
- https://doi.org/10.1016/0167-9317(95)00243-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Towards a better understanding of positive chemically amplified systems.Journal of Photopolymer Science and Technology, 1995
- Airborne Contamination of a Chemically Amplified Resist. 2. Effect of Polymer Film Properties on Contamination RateChemistry of Materials, 1994
- Phase transfer catalysis in the tert-butyloxycarbonylation of alcohols, phenols, enols, and thiols with di-tert-butyl dicarbonateCanadian Journal of Chemistry, 1985