Coercivity, structure, and stoichiometry of Permalloy/alumina multilayers

Abstract
A series of permalloy/alumina multilayers were examined to determine their structure, composition, and magnetic performance. The conditions of permalloy and alumina-layer thickness, and substrate bias necessary to minimize the coercivity have been shown. Multilayer structures with alumina-layer thicknesses of less than 100 Å and permalloy-layer thicknesses between 400 and 500 Å had the lowest coercivities. Structures were examined by RBS, TEM, AES, and XRD to study the effect of bias sputtering on the structure and composition of the multilayers. It was found that sputtering multilayers at high biases did not affect the coercivity, but did cause significant physical and chemical changes.

This publication has 5 references indexed in Scilit: