Gallium Contamination of InP Epitaxial Layers in InP / InGaAsP Multilayer Structures Grown by Hydride Transport Vapor Phase Epitaxy
- 1 May 1985
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 132 (5) , 1187-1193
- https://doi.org/10.1149/1.2114056
Abstract
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