Probing capped and uncapped mesoporous low-dielectric constant films using positron annihilation lifetime spectroscopy
- 16 October 2000
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 77 (16) , 2470-2472
- https://doi.org/10.1063/1.1318238
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Supramolecular Approaches to Nanoscale Dielectric Foams for Advanced Microelectronic DevicesMRS Bulletin, 2000
- Positronium annihilation in mesoporous thin filmsPhysical Review B, 1999
- Free volumes and their distribution in crosslinked polysiloxanes probed by positron annihilation lifetime techniquePolymer, 1998
- Positron and Positronium Annihilation Lifetime Studies of Pores and Free Volumes in Silica Xerogels Prepared by Sol-Gel ProcessMaterials Science Forum, 1997
- High performance hybrid slow positron beam and its user application spectrumApplied Surface Science, 1997
- Positron Annihilation in PolymersMaterials Science Forum, 1994
- Reemitted-positron spectroscopy of cobalt and nickel silicide filmsPhysical Review B, 1992
- Positron backscattering from elemental solidsJournal of Physics: Condensed Matter, 1992
- Measurement of the Positron Surface-State Lifetime for AlPhysical Review Letters, 1984
- CONTIN: A general purpose constrained regularization program for inverting noisy linear algebraic and integral equationsComputer Physics Communications, 1982