Antiresonant reflecting optical waveguides in strip configuration
- 17 January 1994
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 64 (3) , 276-278
- https://doi.org/10.1063/1.111179
Abstract
A monomode antiresonant reflecting optical strip waveguide has been realized in SiON. The lateral confinement is provided by strip-loaded reflectors fabricated by reactive ion beam etching.Keywords
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