Magnetically driven micropositioners
- 1 October 1985
- journal article
- letter
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 56 (10) , 1970-1971
- https://doi.org/10.1063/1.1138405
Abstract
Several designs are presented for micropositioners which use permanent magnets and current carrying coils to attain controlled displacements down to 5 nm while possessing a dynamic range of several centimeters. Angular displacements of less than 10−3 rad are also possible.Keywords
This publication has 1 reference indexed in Scilit:
- Low-temperature vacuum tunneling microscopyApplied Physics Letters, 1984