Uniform-stress tungsten on x-ray mask membranes via He–backside temperature homogenization
- 1 November 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (6) , 4024-4027
- https://doi.org/10.1116/1.587423
Abstract
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