Vacuum-deposited TiNi shape memory film: characterization and applications in microdevices
- 1 March 1991
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 1 (1) , 34-41
- https://doi.org/10.1088/0960-1317/1/1/007
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Miniaturized total chemical analysis systems: A novel concept for chemical sensingSensors and Actuators B: Chemical, 1990