Modular Thin Film Deposition System
- 1 July 1971
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 42 (7) , 1049-1051
- https://doi.org/10.1063/1.1685276
Abstract
A modular thin film deposition system has been designed in which several arrangements of source, substrate, and associated deposition facilities are possible. The system is compatible for use with different pumping arrangements and has been used in this laboratory in conjunction with various thin film studies.Keywords
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