Oxygen Clusters in As-Grown Cz-Si Crystals Probed by Positron Annihilation

• 1 October 1993
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 143-147, 1583-1588
• https://doi.org/10.4028/www.scientific.net/msf.143-147.1583

Abstract

Keywords

• OXYGEN
• POSITRON ANNIHILATION
• QUENCHING
• SILICON
• STACKING FAULT