Condensation polymerization of tetrakis(ethylamino)silane and its thermal decomposition to silicon nitride (Si3N4/silicon carbide (SiC)) ceramics
- 1 July 1991
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 3 (4) , 721-730
- https://doi.org/10.1021/cm00016a029