Soft magnetic properties of Fe-N thin films sputtered in Ar+N2 plasma.
Open Access
- 1 January 1990
- journal article
- Published by The Magnetics Society of Japan in Journal of the Magnetics Society of Japan
- Vol. 14 (2) , 283-288
- https://doi.org/10.3379/jmsjmag.14.283
Abstract
総合学術電子ジャーナルサイト「J-STAGE」-国内で発行された学術論文全文を読むことのできる、日本最大級の総合電子ジャーナルプラットフォームです。Keywords
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- Magnetic properties of Fe-Si-Al sputtered films.Journal of the Magnetics Society of Japan, 1987