A laser scan technique for electronic materials surface evaluation

• 1 February 1974
• journal article
• Published by Springer Nature in Journal of Electronic Materials
• Vol. 3  (1) , 225-242
• https://doi.org/10.1007/bf02654554

Abstract

Keywords

• SILICON SURFACES
• LASER
• SURFACE INSPECTION
• SEMICONDUCTOR PROCESSING
• EVALUATION OF FLAT SURFACES